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Structural properties of Al-O monolayers in SiO<sub>2</sub> on silicon and the maximization of their negative fixed charge density
Hiller, D., Göttlicher, J., Steininger, R., Huthwelker, T., Julin, J., Munnik, F., … König, D. (2018). Structural properties of Al-O monolayers in SiO2 on silicon and the maximization of their negative fixed charge density. ACS Applied Materials and Interfaces, 10(36), 30495-30505. https://doi.org/10.1021/acsami.8b06098