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Nearly amorphous Mo-N gratings for ultimate resolution in extreme ultraviolet interference lithography
Wang, L., Kirk, E., Wäckerlin, C., Schneider, C. W., Hojeij, M., Gobrecht, J., & Ekinci, Y. (2014). Nearly amorphous Mo-N gratings for ultimate resolution in extreme ultraviolet interference lithography. Nanotechnology, 25(23), 235305 (7 pp.). https://doi.org/10.1088/0957-4484/25/23/235305
Smoother Mo films for molded FEAs by addition of N-2 to Ar sputter gas
Kirk, E., Mustonen, A., Pomjakushina, E., Ritter, S., Gobrecht, J., & Tsujino, S. (2011). Smoother Mo films for molded FEAs by addition of N-2 to Ar sputter gas. In A. Klümper (Ed.), International conference on vacuum nanoelectronics (IVNC). Proceedings. 2011 24th international vacuum nanoelectronics conference (p. (2 pp.).
Fabrication of all-metal field emitter arrays with controlled apex sizes by molding
Kirk, E., Tsujino, S., Vogel, T., Jefimovs, K., Gobrecht, J., & Wrulich, A. (2009). Fabrication of all-metal field emitter arrays with controlled apex sizes by molding. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 27(4), 1813-1820. https://doi.org/10.1116/1.3151852
Four-terminal field-emission characteristics of double-gate metallic fieldemitter array cathodes with controlled apex sizes fabricated by molding and self-aligned gate process
Tsujino, S., Kirk, E., Vogel, T., & Gobrecht, J. (2009). Four-terminal field-emission characteristics of double-gate metallic fieldemitter array cathodes with controlled apex sizes fabricated by molding and self-aligned gate process. In 2009 IEEE international vacuum electronics conference. 2009 IEEE international vacuum electronics conference. IVEC 2009 Rome (pp. 327-328). https://doi.org/10.1109/IVELEC.2009.5193415
Ultrafast electron emission from metallic nanotip arrays induced by near infrared femtosecond laser pulses
Tsujino, S., Beaud, P., Kirk, E., Vogel, T., Sehr, H., Gobrecht, J., & Wrulich, A. (2008). Ultrafast electron emission from metallic nanotip arrays induced by near infrared femtosecond laser pulses. Applied Physics Letters, 92(19), 193501 (3 pp.). https://doi.org/10.1063/1.2924290
Nanoseconds field emitted current pulses from ZrC needles and field emitter arrays
Ganter, R., Bakker, R. J., Betemps, R., Dehler, M., Gerber, T., Gobrecht, J., … Wrulich, A. (2006). Nanoseconds field emitted current pulses from ZrC needles and field emitter arrays. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 24(2), 974-978. https://doi.org/10.1116/1.2174025