Hiller, D., Göttlicher, J., Steininger, R., Huthwelker, T., Julin, J., Munnik, F., … König, D. (2018). Structural properties of Al-O monolayers in SiO2 on silicon and the maximization of their negative fixed charge density. ACS Applied Materials and Interfaces, 10(36), 30495-30505. https://doi.org/10.1021/acsami.8b06098