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Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses
Rösner, B., Koch, F., Döring, F., Bosgra, J., Guzenko, V. A., Kirk, E., … David, C. (2018). Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses. Microelectronic Engineering, 191, 91-96. https://doi.org/10.1016/j.mee.2018.01.033