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Nanoimprint lithography process chains for the fabrication of micro-and nanodevices
Schift, H., Urwyler, P., Kristiansen, P. M., & Gobrecht, J. (2014). Nanoimprint lithography process chains for the fabrication of micro-and nanodevices. Journal of Micro/Nanolithography, MEMS, and MOEMS, 13(3), 031303 (10 pp.). https://doi.org/10.1117/1.JMM.13.3.031303